8 results
Low-Temperature Polycrystalline Silicon Thin-Film Transistors and Circuits on Flexible Substrates
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- Journal:
- MRS Bulletin / Volume 31 / Issue 6 / June 2006
- Published online by Cambridge University Press:
- 31 January 2011, pp. 461-465
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- June 2006
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In-situ Ellipsometry Study of Ion Bombardment Effects on Low Temperature Si Epitaxy by dc Magnetron Sputtering
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- Journal:
- MRS Online Proceedings Library Archive / Volume 354 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 75
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- 1994
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Boron Doped A-Si,C:H Grown by Reactive Magnetron Sputtering from Doped Targets
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- Journal:
- MRS Online Proceedings Library Archive / Volume 336 / 1994
- Published online by Cambridge University Press:
- 16 February 2011, 589
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- 1994
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The Relation Between Microstructure and Electronic Properties of Magnetron Sputtered a-Si1−x,Cx:H
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- Journal:
- MRS Online Proceedings Library Archive / Volume 297 / 1993
- Published online by Cambridge University Press:
- 01 January 1993, 675
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- 1993
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Ellipsometry Studies of (μc-Si:H/ZnO) and (μc-Si:H/a-Si:H) Interfaces in Magnetron Sputtering System
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- Journal:
- MRS Online Proceedings Library Archive / Volume 297 / 1993
- Published online by Cambridge University Press:
- 01 January 1993, 25
- Print publication:
- 1993
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Investigation of Hydrogen and Nitrogen Thermal Stability in PECVD a-Sinx:H.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 258 / 1992
- Published online by Cambridge University Press:
- 21 February 2011, 649
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- 1992
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Small-Angle X-Ray Scattering from a-Si:H and a-SiC:H Alloys Prepared by Reactive DC Magnetron Sputtering
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- Journal:
- MRS Online Proceedings Library Archive / Volume 258 / 1992
- Published online by Cambridge University Press:
- 21 February 2011, 311
- Print publication:
- 1992
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Correlation of Rutherford Backscattering and Electrical Measurements on Si Implanted InP Following Rapid Thermal and Furnace Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 45 / 1985
- Published online by Cambridge University Press:
- 25 February 2011, 297
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- 1985
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